Standard Svensk standard · SS-EN ISO 14644-10:2022

Renrum och tillhörande renhetskontrollerade miljöer - Del 10: Klassificering av ytors kemiska renhet (ISO 14644-10:2022)

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Standard Svensk standard · SS-EN ISO 14644-10:2022

Renrum och tillhörande renhetskontrollerade miljöer - Del 10: Klassificering av ytors kemiska renhet (ISO 14644-10:2022)
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Omfattning
This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.
NOTE 1    For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface.
NOTE 2    This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.

Ämnesområden

Rena rum och rena zoner (13.040.35)


Köp denna standard

Standard Svensk standard · SS-EN ISO 14644-10:2022

Renrum och tillhörande renhetskontrollerade miljöer - Del 10: Klassificering av ytors kemiska renhet (ISO 14644-10:2022)
Prenumerera på standarden - Läs mer Dölj
Pris: 1 045 SEK
standard ikon pdf

PDF

Pris: 1 045 SEK
standard ikon

Papper

Pris: 1 672 SEK
standard ikon pdf + standard ikon

PDF + papper

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Produktinformation

Språk: Engelska

Framtagen av: Renhetsteknik, SIS/TK 108

Internationell titel: Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)

Artikelnummer: STD-80035553

Utgåva: 2

Fastställd: 2022-05-24

Antal sidor: 40

Ersätter: SS-EN ISO 14644-10:2013