This International Standard specifies a test method for the determination of hydrocarbons, chlorocarbons and partially or completely substituted halocarbons or halohydrocarbons contained as impurities in uranium hexafluoride (UF6) by infrared (IR) spectrometry. This method cannot be used for compounds giving IR rays with interference by UF6 (for example CF4). The test method is quantitative and applicable in the mole fraction from 0,000 1 % or 0,001 0 %, depending on the type of impurity, up to 0,100 %. The test method can also be used for the determination of hydrofluoric acid (HF) and several elements existing as fluorides; boron in BF3, silicon in SiF4, phosphorus in PF5, molybdenum in MoF6 and tungsten in WF6.