Standard Swedish standard · SS-EN ISO 25178-603:2013

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)

Status: Valid

Scope
This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

Subjects

Properties of surfaces (17.040.20)


Product information

Language: English

Written by: GPS och verifiering - Mätteknik, SIS/TK 507/AG 06

International title:

Article no: STD-99581

Edition: 1

Approved: 10/3/2013

No of pages: 44