This Technical Specification gives terms and definitions related to nanomanufacturing processes in the field of nanotechnologies. It forms one part of multi-part terminology and definitions documentation covering the different aspects of nanotechnologies.

All the process terms in this document are relevant to nanomanufacturing. Many of the listed processes are not exclusively relevant to the nanoscale. Depending on controllable conditions, such processes may result in material features at the nanoscale or, alternatively, larger scales.

There are many other terms that name tools, components, materials, systems control methods or metrology methods associated with nanomanufacturing that are beyond the scope of this document.