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Standard Swedish standard · SS-EN ISO 14644-10:2013

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)

Status: Valid

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Scope
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

Subjects

Cleanrooms and associated controlled environments

Product information

Language: English

Written by: SIS - Industriteknik

International title: Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)

Article no: STD-89404

Edition: 1

Approved: 3/11/2013

No of pages: 44

Related

Standards
SS-EN ISO 14644-7:2004 Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators, mini-environments) (ISO 14644-7:2004)
SS-EN ISO 14644-3:2005 Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2005)
SS-EN ISO 14644-5:2004 Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004)
Swedish Institute for Standards
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