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Standard Foreign standard · DIN 32563

Production equipment for microsystems - System for classification of components for microsystems

Status: Valid

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Subjects

Characteristics and design of machines, apparatus, equipment Optical equipment

Product information

Language: German

Written by: DIN

International title: Production equipment for microsystems - System for classification of components for microsystems

Article no: STD-8009785

Edition: 2002

Approved: 3/1/2002

No of pages: 16

Related

Standards
SS-EN 61703 Mathematical expressions for reliability, availability, maintainability and maintenance support terms
SS-EN ISO 13696 Optics and optical instruments - Test methods for radiation scattered by optical components (ISO 13696:2002)
SS-EN 60706-5 Maintainability of equipment - Part 5: Testability and diagnostic testing
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