1.1 This practice covers a measurement procedure to calibrate the z-scale of an atomic force microscope using Si(111) monatomic step height specimens.1.2 ApplicationsThis procedure is applicable either in ambient or vacuum condition when the ato
ASTM
Standard Practice for Calibrating the Z-Magnification of an Atomic Force Microscope at Subnanometer Displacement Levels Using Si(111) Monatomic Steps
STD-57223
2006
2006-11-01
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