1.1 This test method covers testing all wipers used in clean rooms and other controlled environments for characteristics related to particulate cleanliness.1.2 This test method includes the use of computer-based image analysis and counting hardw
ASTM
Standard Test Method for Size-Differentiated Counting of Particles and Fibers Released from Clean Room Wipers Using Optical and Scanning Electron Microscopy
STD-47249
2000
2000-05-10
11